Other Types of Systems

CV400,600,1000. Larger sizes, bell jar and baseplate, box chambers or specialized (UHV, ovens, reactors). These often are electron-beam or multi-source sputterers, plasma processors.  R&D and production

Glove box evaporators. Used in polymer electronics, OLED production, for deposition without exposure to air. Multi-chamber versions. 

Etch. 300mm plasma/RIE flexible tool for silicon wafer failure analysis, experimental quartz crystal etch.  Parallel plate, rf, microwave.

 

 

 

 

 

 

Environmental, space simulators, ovens, degassers, backfills. Variety of sizes and configurations from tabletop to walk-in, with thermal and other processes.