Butterfly Sputter Shutter Valve
- Throttle only, non-sealing
- All parts 304 stainless steel
- Control shaft differentially pumped
- Sandwich design
- Bakeable to 200C
Description
The Cooke Sputter-Shutter Valve combines high conductance and effective
throttle capabilities. The 90-degree shaft rotation controls conductance
from 5% to 95% of theoretical. The control shaft moves a split blade for
a vernier effect over 5% to 25% of the conductance region with accurate
repeatability. Additional Information
- Bakeable to 200 C.Choice of elastomer O rings.
- Pneumatic operated actuator needs 60-80 PSI.
- Leak-test certified to 10^-8 std. cc/sec.
- Inert gas weld construction.
- Pneumatic solenoid and motor operated actuator need 115v, 60Hz current.
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